Rotary Joint for Semiconductor Application
This is an epoch-making compact cartridge type rotary joint incorporating a mechanical seal. Optimized design enables low torque joint. The rotary joint is used for CMP (Chemical Mechanical Polishing) or lapping equipments which polish wafers in the production process of semiconductors.
Magnetic Fluid Vacuum Seal
This vacuum seal is a clean seal which retains magnetic fluid around a rotary shaft by using magnet. The seal is used as a vacuum seal for semiconductor manufacturing equipments and flat panel display manufacturing equipments, as a dust seal for bearings of conveying robots, etc.
“SUPERIOR” series is newly developed as the O-Ring material with better chemical resistance, Low outgas generation, and light heat resistance especially for semiconductor process industry.
Welded Metal Bellows
EKK welded metal bellows are of the nesting type, manufactured by precision forming and welding techniques. The physical properties and chemical composition are controlled strictly according to the U.S. quality control standards for rockets and aircraft. Bellows products utilizing the durability, pressure resistance and uniform displacement include bellows seals and vacuum bellows in semiconductor or electronic parts manufacturing facilities, and have earned a reputation for high performance. Additional products manufactured by EKK include welded metal bellows expansion joints, accumulators, bellows couplings for precision equipments, fuel control rods for nuclear reactors, ultra high vacuum equipments for nuclear fusion and various bellows for experimental facilities.