PRODUCTS
SUPERIOR
“SUPERIOR” series is newly developed as the O-Ring material with better chemical resistance, Low outgas generation, and light heat resistance especially for semiconductor process industry.
Feature
FKM and VMQ for various applications in semiconductor manufacturing process are available.
Excellent resistance for plasma.
Excellent resistance for chemical.
Small outgas generation.
Continuity of the good resistance against photo thermal generated in the manufacturing process of semiconductor.
