For Semiconductor Industry

Our business for the semiconductor industry provides magnetic fluid seals, bellows, rotary joints, and elastomer seals used in semiconductor manufacturing equipment around the world. In the semiconductor industry, our group is the only company in the world that can manufacture all kinds of seal products in-house.

Low dust generation, low friction, heat resistance, plasma resistance, etc. are required Our seal products are used in manufacturing equipment such as semiconductor chips and FPDs.

Our Products

Magnetic Fluid Vacuum Seal

This vacuum seal is a clean seal which retains mag…

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Rotary Joint for Semiconductor Application

This is an epoch-making compact cartridge type rot…

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Welded Metal Bellows

EKK welded metal bellows are of the nesting type, …

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SUPERIOR

“SUPERIOR” series is newly developed as the O-Ring…

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